Anisotropic stress state around internally pressurized microchannels
نویسندگان
چکیده
منابع مشابه
Failure Mechanisms of Pressurized Microchannels, Model and Experiments
Microchannels were created by fusion bonding of a Pyrex and a thermally oxidized silicon wafer. The maximum pressure which can be applied to these channels was investigated. In order to find the relation between this maximum pressure, channel geometry, materials elasticity and bond energy an energy model was developed. It was shown that the model is substantiated by the pressure data, from whic...
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ژورنال
عنوان ژورنال: Journal of Mechanics of Materials and Structures
سال: 2008
ISSN: 1559-3959
DOI: 10.2140/jomms.2008.3.291